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Lyshevski S.E. Nano-and micro-electromechanical systems: fundamentals of nano- and microengineering / Lyshevski S.E. - 2nd ed. - Boca Raton: CRC Press, 2005. - 722 p. - (Nano- and microscience, engineering, technology, and medicine; vol.8). - ISBN 0-8493-2838-1.
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