98.
(11) Patent number: 2152455
(46) Date of publication: 10.07.2000
(51) Int. Cl.7: C 23 C 14/48
(21) Application number: 97121895/02
(22) Application date: 31.12.1997
(71) Applicant:
Institut fiziki prochnosti i materialovedenija SO RAN
(72) Inventor:
Gritsenko B.P.,
Vtorushin V.V.,
Sharkeev Ju.P.
(73) Proprietor:
Institut fiziki prochnosti i materialovedenija SO RAN
(98) Mail address:
634021, g.Tomsk, pr. Akademicheskij 2/1, IFPM SO RAN, patentnyj otde
(54) PROCESS OF ION-BEAM MACHINING OF ARTICLES
(57)
FIELD: manufacture of tools. SUBSTANCE: process includes formation of first layer by way of implantation of ions of metal and (or ) non-metal chosen from group of elements forming solid solutions with energy of 80-200 keV, formation of second layer with reduced energy of implanted ions. Second layer is formed with energy of ions of 20-80 keV and fluence of 5ґ1016 -5ґ1017 ion/sq. cm, niobium being one of implanted elements of second layer. EFFECT: raised wear resistance of cutting edges of tools, of die-stamped attachments, of parts of machines and mechanisms. 1 cl, 2 tbl
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