Handbook of optical dimensional metrology / ed. by K.Harding. - Boca Raton: CRC/Taylor & Francis, 2013. - xiii, 492 p.: ill. - (Series in optics and optoelectronics). - Incl. bibl. ref. - Ind.: p.481-492. - Пер. загл.: Руководство по оптической размерной метрологии. - ISBN 978-1-4398-5481-5  Место хранения:   02 | Отделение ГПНТБ СО РАН | Новосибирск

Оглавление / Contents

Preface ....................................................... vii Editor ......................................................... xi Contributors ................................................. xiii Part I Optical Metrology: Introduction 1 Optical Metrology Overview ................................... 3 Kevin Harding 2 Machine Vision for Metrology ................................ 37 Kevin Harding and Gil Abramovich Part II Optical Metrology of Larger Objects 3 Laser Tracking Systems ...................................... 93 Scott Sandwith and Stephen Kyle 4 Displacement Measuring Interferometry ...................... 157 Vivek G. Badami and Peter J. de Groot 5 Metrology of Large Parts ................................... 239 H. Philip Stahl Part III Optical Metrology of Medium Size Objects 6 Portable Metrology ......................................... 265 Daniel Brown and Jean Francois Laurie 7 Phase-Shifting Systems and Phase-Shifting Analysis ......... 287 Qingying Нu 8 Moiré Measurement .......................................... 333 Toru Yoshizaiva and Lianhua Jin Part IV Optical Micro-Metrology of Small Objects 9 Automation in Interferometry ............................... 369 Erik Novak and Bryan Guenther 10 White-Light Interference 3D Microscopes .................... 395 Joanna Schmit 11 Focus-Based Optical Metrology .............................. 419 Kevin Harding Part V Advanced Optical Micro-Metrology Methods 12 Parallel Multifunctional System for MEMS/MOEMS and Microoptics Testing ........................................ 451 Malgorzata Kujawińska, Michał Józwik, and Adam Styk Index ......................................................... 481