Plasma processing of nanomaterials / ed. by R.M.Sankaran. - Boca Raton: CRC Press, 2012. - xiii, 408 p.: ill. - (Nanomaterials and their applications). - Incl. bibl. ref. - Ind.: p.393-408. - ISBN 978-1-4398-6676-4  Место хранения:   019 | Институт теплофизики им. С.С.Кутателадзе CO РАН | Новосибирск | Библиотека

Оглавление / Contents

Preface ....................................................... vii Contributors ................................................... xi 1 Nanoscale Etching and Deposition ............................. 1 Nathan Marchack and Jane P. Chang 2 Extreme Ultraviolet Light Lithography for Producing Nanofeatures in Next-Generation Semiconductor Processing .... 35 John Sporre and David N. Ruzic 3 Nonthermal Plasma Synthesis of Semiconductor Nanocrystals ... 55 Uwe Kortshagen and Lorenzo Mangolini 4 Microscale Plasmas for Metal and Metal Oxide Nanoparticle Synthesis ................................................... 89 Davide Mariotti and R. Mohan Sankaran 5 Large-Scale, Plasma-Assisted Growth of Nanowires ........... 109 Uros Cvelbar and Mahendra K. Sunkara 6 Cathodic Arc Discharge for Synthesis of Carbon Nanoparticles .............................................. 147 Manish Chhowalla and H. Emrah Unalan 7 Atmospheric Plasmas for Carbon Nanotubes (CNTs) ............ 165 Jae Beom Park, Se Jin Kyung, and Geun Young Yeom 8 Structural Control of Single-Walled Carbon Nanotubes by Plasma Chemical Vapor Deposition ........................... 219 Rikizo Hatakeyama and Toshiaki Kato 9 Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition (PECVD) ......................................... 231 M. Meyyappan and Jeong-Soo Lee 10 Modeling Aspects of Plasma-Enhanced Chemical Vapor Deposition of Carbon-Based Materials ....................... 245 Erik Neyts, Ming Mao, Maxie Eckert, and Annemie Bogaerts 11 Modeling Catalytic Growth of One-Dimensional Nanostructures ............................................. 291 Eugene Tarn, Kostya (Ken) Ostrikov, and Tony Murphy 12 Diagnostics of Energy Fluxes in Dusty Plasmas .............. 309 Horst R. Maurer and Holger Kersten 13 Selective Functionalization and Modification of Carbon Nanomaterials by Plasma Techniques ......................... 337 Yuhua Xue and Liming Dai 14 Plasma-Liquid Interactions for Fabrication of Nanobiomaterials ........................................... 359 Toshiro Kaneko and Rikizo Hatakeyama 15 Assembly and Self-Organization of Nanomaterials ............ 371 Amanda Evelyn Rider and Kostya (Ken) Ostrikov Index ......................................................... 393