Contributor contact details .................................... xi
Woodhead Publishing Series in Electronic and Optical
Materials ...................................................... xv
Part I Introduction ............................................ 1
1 Fundamentals of semiconductor gas sensors .................... 3
N. Yamazoe and K. Shimanoe, Kyushu University, Japan
1.1 Introduction ............................................ 3
1.2 Classification of semiconductor gas sensors ............. 4
1.3 Resistor type sensors: empirical aspects ................ 5
1.4 Resistor type sensors: theoretical aspects ............. 13
1.5 Non-resistive sensors .................................. 23
1.6 Future trends .......................................... 31
1.7 References ............................................. 33
2 Conduction mechanism in semiconducting metal
oxide sensing films: impact on transduction ................. 35
N. Bârsan, M. Huebner and U. Weimar, University of Tübingen,
Germany
2.1 Introduction ........................................... 35
2.2 General discussion about sensing with semiconducting
metal oxide gas sensors ................................ 36
2.3 Sensing and transduction for p- and n-type
semiconducting metal oxides ............................ 42
2.4 Investigation of the conduction mechanism in
semiconducting metal oxide sensing layers: studies in
working conditions ..................................... 51
2.5 Conclusion and future trends ........................... 61
2.6 References ............................................. 61
3 Electrode materials and electrode-oxide interfaces in
semiconductor gas sensors ................................... 64
S.P. Lee, Kyungnam University, Korea
3.1 Introduction ........................................... 64
3.2 Electrode materials for semiconductor gas sensors ...... 65
3.3 Electrode-oxide semiconductor interfaces ............... 80
3.4 Charge carrier transport in the electrode-oxide
semiconductor interfaces ............................... 89
3.5 Gas/solid interactions in the electrode-oxide
semiconductor interfaces .............................. 103
3.6 Conclusion ............................................ 109
3.7 References ............................................ 109
Part II Advanced sensing methods and structures ............... 115
4 Recent trends in silicon carbide (SiC) and graphene-
based gas sensors .......................................... 117
M. Andersson, A. Lloyd Spetz and R. Pearce, Linköping
University, Sweden
4.1 Introduction .......................................... 117
4.2 Background: transduction and sensing mechanisms........ 119
4.3 Recent material developments for improved
selectivity of SiC gas sensors ........................ 130
4.4 Dynamic sensor operation .............................. 134
4.5 Novel SiC and graphene-based sensor devices ........... 137
4.6 Conclusion ............................................ 148
4.7 References ............................................ 150
5 Recent advances in wide bandgap semiconductor-
based gas sensors .......................................... 159
F. Ren and S.J. Pearton, University of Florida, USA
5.1 Introduction .......................................... 159
5.2 Gas sensing ........................................... 160
5.3 Hydrogen sensing ...................................... 167
5.4 GaN Schottky diode sensor ............................. 182
5.5 Nanostructured wide bandgap materials ................. 188
5.6 Silicon carbide Schottky diode hydrogen sensor ........ 199
5.7 Wireless sensor network development ................... 201
5.8 Conclusion ............................................ 205
5.9 Acknowledgments ....................................... 206
5.10 References ............................................ 207
6 Micromachined semiconductor gas sensors .................... 220
D. Briand, Ecole Polytechnique Fédérale de Lausanne,
Switzerland and J. Courbat, Innovative Sensor Technology
1ST AG, Switzerland
6.1 Introduction .......................................... 220
6.2 A brief history of semiconductors as gas sensitive
devices ............................................... 221
6.3 Micro-hotplate concept and technologies ............... 222
6.4 Micromachined metal-oxide gas sensors ................. 230
6.5 Complementary metal-oxide semiconductor (CMOS)-
compatible metal-oxide gas sensors .....................242
6.6 Micromachined field-effect gas sensors ................ 247
6.7 Trends and perspectives ............................... 249
6.8 Conclusion ............................................ 255
6.9 References ............................................ 255
7 Semiconducting direct thermoelectric gas sensors ........... 261
F. Rettig and R. Moos, University of Bayreuth, Germany
7.1 Introduction .......................................... 261
7.2 Direct thermoelectric gas sensors ..................... 267
7.3 Conclusion and future trends .......................... 291
7.4 References ............................................ 293
Part III Nanomaterials for gas sensing ........................ 297
8 One- and two-dimensional metal oxide
nanostructures for chemical sensing ........................ 299
E. Comini, Brescia University, Italy
8.1 Introduction .......................................... 299
8.2 Deposition techniques ................................. 300
8.3 Conductometric sensor ................................. 306
8.4 Transduction principles and related novel devices ..... 307
8.5 Conclusion and future trends .......................... 310
8.6 References ............................................ 310
9 Semiconductor quantum dots for photoluminescence-based gas
sensing .................................................... 316
Z. Zhao, M.A. Carpenter and M.A. Petrukhina,University
at Albany-SUNY, USA
9.1 Introduction .......................................... 316
9.2 Quantum dot synthesis, surface functionalization and
polymer encapsulation ................................. 319
9.3 Quantum dots for sensing: dependence of detection
limits and selectivity on surface-modifying ligands ... 329
9.4 Quantum dot-polymer system ............................ 338
9.5 Quantum dot-nanopore array system ..................... 343
9.6 Conclusion and future trends .......................... 348
9.7 Acknowledgments ....................................... 349
9.8 References ............................................ 349
10 Coated and functionalised single-walled carbon
nanotubes (SWCNTs) as gas sensors .......................... 356
Y. Battie, Université de Lorraine, France and O. Ducloux,
ONERA, France
10.1 Introduction .......................................... 356
10.2 Gas sensor architecture ............................... 358
10.3 Gas sensing mechanisms ................................ 364
10.4 Routes towards sensor selectivity ..................... 370
10.5 Applications .......................................... 377
10.6 Conclusion ............................................ 380
10.7 References ............................................ 381
11 Carbon nanotube and metal oxide hybrid materials
for gas sensing ............................................ 386
T. Kerdcharoen, Mahidol University, Thailand and
C. Wongchoosuk, Kasetsart University, Thailand
11.1 Introduction .......................................... 386
11.2 Fabrication and synthesis of carbon nanotube-metal oxide
sensing devices ....................................... 389
11.3 Preparation of carbon nanotube-metal oxide sensing
films ................................................. 390
11.4 Sensor assembly ....................................... 395
11.5 Characterization of carbon nanotube-metal oxide
materials ............................................. 396
11.6 Sensing mechanism of carbon nanotube-metal oxide gas
sensors ............................................... 401
11.7 Conclusion ............................................ 403
11.8 References ............................................ 403
12 Porous silicon gas sensors ................................. 408
V.M. Aroutiounian, Yerevan State University, Armenia
12.1 Introduction .......................................... 408
12.2 Conductivity and capacitance sensors .................. 409
12.3 Luminescence from PSi ................................. 411
12.4 Optical and photo properties of PSi sensors ........... 414
12.5 PSi noise sensors ..................................... 417
12.6 Different PSi gas sensors ............................. 422
12.7 Conclusion ............................................ 424
12.8 References ............................................ 425
Part IV Applications of semiconductor gas sensors ............. 431
13 Metal oxide semiconductor gas sensors in
environmental monitoring ................................... 433
R. Binions, Queen Mary, University of London, UK and
A.J.T. Naik, University College London, UK
13.1 Introduction .......................................... 433
13.2 Sensor synthesis methods .............................. 436
13.3 Metal oxide semiconductors in detecting
environmentally important gases ....................... 442
13.4 Advances in carbon monoxide sensors ................... 446
13.5 Advances in carbon dioxide sensors .................... 448
13.6 Advances in nitrogen oxides sensors ................... 452
13.7 Future trends ......................................... 456
13.8 Conclusion ............................................ 460
13.9 Sources of further information and advice ............. 460
13.10 References ........................................... 461
14 Semiconductor gas sensors for chemical warfare
agents ..................................................... 467
D.-D. Lee and J.-C. Kim, Kyungpook National University, Korea
14.1 Introduction .......................................... 467
14.2 Chemical warfare agents ............................... 468
14.3 Chemical warfare agent detecting techniques ........... 471
14.1 Device preparation .................................... 473
14.5 Sensing properties .................................... 479
14.6 Conclusion ............................................ 488
14.7 References ............................................ 488
15 Integrated complementary metal oxide semiconductor-based
sensors for gas and odour detection ........................ 491
P.K. Guha and S. Santra, Indian Institute of Technology,
Kharagpur, India and J.W. Gardner, University of Warwick, UK
15.1 Introduction .......................................... 491
15.2 Micro-resistive complementary metal oxide
semiconductor gas sensors ............................. 492
15.3 Micro-calorimetric complementary metal oxide
semiconductor gas sensor .............................. 495
15.4 Sensing materials and their deposition on complementary
metal oxide semiconductor gas sensors ................. 496
15.5 Interface circuitry and its integration ............... 499
15.6 Integrated multi-sensor and sensor array systems ...... 504
15.7 Conclusion and future trends .......................... 506
15.8 Useful web addresses .................................. 507
15.9 References ............................................ 507
16 Solid-state sensors for carbon dioxide detection ........... 510
G.G. Mandayo, CEIT-IK4 and Tecnun, Spain and J. Herrán,
CIDETEC-IK4, Spain
16.1 Introduction .......................................... 510
16.2 Electrochemical sensors ............................... 513
16.3 Impedimetric, capacitive and resistive sensors ........ 520
16.4 Field effect transistor sensors ....................... 527
16.5 New approaches to enhance sensor performance .......... 528
16.6 Conclusion and future trends .......................... 531
16.7 References ............................................ 531
Index ......................................................... 537
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