Preface ......................................................... v
About the Editors ............................................. vii
Contributors ................................................... ix
1 Introduction ................................................. 1
Wanjun Wang and Steven A. Soper
Part I Basic Bio-MEMS Fabrication Technologies
2 UV Lithography of Ultrathick SU-8 for Microfabrication
of High-Aspect-Ratio Microstructures and Applications
in Microfluidic and Optical Components ...................... 11
Ren Yang and Wanjun Wang
3 The LIGA Process: A Fabrication Process for High-Aspect-
Ratio Microstructures in Polymers, Metals, and Ceramics ..... 43
Jost Goettert
4 Nanoimprinting Technology for Biological Applications ....... 93
Sunggook Park and Helmut Schift
5 Hot Embossing for Lab-on-a-Chip Applications ............... 117
Ian Papautsky
Part II Microfluidic Devices and Components for Bio-MEMS
6 Micropump Applications in Bio-MEMS ......................... 143
Jeffrey D. Zahn
7 Micromixers ................................................ 177
Dimitris E. Nikitopoulos and A. Maha
8 Microfabricated Devices for Sample Extraction,
Concentrations, and Related Sample Processing
Technologies ............................................... 213
Gang Chen and Yuehe Lin
9 Bio-MEMS Devices in Cell Manipulation: Microflow
Cytometry and Applications ................................. 237
Choongho Yu and Li Shi
Part III Sensing Technologies for Bio-MEMS Applications
10 Coupling Electrochemical Detection with Microchip
Capillary Electrophoresis .................................. 265
Carlos D. Garcia and Charles S. Henry
11 Culture-Based Biochip for Rapid Detection of
Environmental Mycobacteria ................................. 299
Ian Papautsky and Daniel Oerther
12 MEMS for Drug Delivery ..................................... 325
Kabseog Kim and Jeong-Bong Lee
13 Microchip Capillary Electrophoresis Systems for DNA
Analysis ................................................... 349
Ryan T. Kelly and Adam T. Woolley
14 Bio-MEMS Devices for Proteomics ............................ 363
Justin S. Mecomber, Wendy D. Dominick, Lianji Jin, and
Patrick A. Limbach
15 Single-Cell and Single-Molecule Analyses Using
Microfluidic Devices ....................................... 391
Malgorzata A. Witek, Mateusz L. Hupert, and Steven
A. Soper
16 Pharmaceutical Analysis Using Bio-MEMS ..................... 443
Celeste Frankenfeld and Susan Lunte
Index ......................................................... 467
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