Foreword ........................................................ V
Preface
Jurgen Jahns, Karl-Heinz Brenner ........................... VII
Microstructure Technology for Optical Component Fabrication
E.-Bernhard Kley, Lars-Christian Wittig,
Andreas Tünnermann ........................................... 1
Microlithographic Pattern Generation for Optics
Bernd Schnabel .............................................. 29
Modeling of Free-Space Microoptics
Uwe D. Zeitner, Peter Schreiber, Wolfgang Karthe ............ 43
Modeling of Photonic Waveguides and Circuits
Reinhard Marz ............................................... 57
Modeling of Waveguide-Optical Devices by the Method of Lines
Reinhold Pregla ............................................. 77
Microoptics Using the LIGA Technology
Ines Frese .................................................. 99
Modular Fabrication Concept for LIGA-Based Microoptics
Jürgen Mohr, Arndt Last, Ulrike Wallrabe ................... 113
Fabrication of Optical Waveguides in Dielectrics by
Femtosecond Laser Pulses
Stefan Nolte, Matthias Will, Jonas Burghoff,
Andreas Tünnermann ......................................... 125
Integrated Planar Erbium-Doped Waveguide Amplifiers:
Technological and Optical Considerations
Matthias Brinkmann, Steffen Reichel, Joseph S. Hayden ...... 143
Two-Dimensional Photonic Crystal Waveguides
Cecile Jamois, Ulrich Gösele, Ralf Boris Wehrspohn,
Christian Hermann, Ortwin Hess, Lucio Claudio Andreani ..... 159
Interferometric Measurement of Microlenses Including
Cylindrical Lenses
Norbert Lindlein, Jürgen Lamprecht, Johannes Schwider ...... 179
The Integrated Microlens: The Development of Vertical and
Horizontal Integration
Masahiro Oikawa ............................................ 215
Planar-Integrated Free-Space Optics: From Components to
Systems
Matthias Gruber, Jürgen Johns .............................. 225
Microoptical Structures for Semiconductor Light Sources
Werner Spath ............................................... 253
Microoptic Sensors
Albrecht Brandenburg ....................................... 261
Fiber-Optic Gyros and MEMS Accelerometers
Andreas Rasch, Eberhard Handrich, Günter Spahlinger,
Martin Hafen, Sven Voigt, Michael Weingartner .............. 275
Microoptical Applications in Spectrally Encoded Fiber
Sensor Systems
Hartmut Bartelt ............................................ 289
Microoptical Beam Shaping for Supershort-Pulse Lasers
Rudiger Grunwald, Volker Kebbel ............................ 299
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